Precision XY stage; 2-phase stepper motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 35 mm/s × 35 mm/s maximum velocity; ball screw
L-738 Precision XY Stage
Clear Aperture, High Travel Accuracy, and Stability
- Travel range 102 mm × 102 mm (4")
- Large aperture, 150 mm × 150 mm
- Unidirectional repeatability to 0.025 µm
- Velocity to 90 mm/s
- 2-phase stepper motors, DC motors
- Incremental linear encoder with 1 nm resolution
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Optical reference and limit switches.
Recirculating ball bearings
When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, and guiding accuracy.
Drive types
- 2-phase stepper motor for high torque even at low velocities and higher resolution
- DC motor for high velocity constancy, low vibration, and high velocities
Application fields
Medical industry. Laser cutting. Biotechnology. Measuring technology. Microscopy.
Specifications
Datasheet L-738
Specifications
Motion | L-738.051100 | L-738.051111 | L-738.051112 | L-738.053111 | L-738.053112 | L-738.053132 | Tolerance | ||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Active axes | X | Y | X | Y | X | Y | X | Y | X | Y | X | Y | |
Travel range in X | 102 mm | 102 mm | 102 mm | 102 mm | 102 mm | 102 mm | |||||||
Travel range in Y | 102 mm | 102 mm | 102 mm | 102 mm | 102 mm | 102 mm | |||||||
Maximum velocity in X, unloaded | 35 mm/s | 35 mm/s | 35 mm/s | 50 mm/s | 50 mm/s | 90 mm/s | |||||||
Maximum velocity in Y, unloaded | 35 mm/s | 35 mm/s | 35 mm/s | 50 mm/s | 50 mm/s | 90 mm/s | |||||||
Orthogonality | ± 96.96 µrad | ± 96.96 µrad | ± 96.96 µrad | ± 96.96 µrad | ± 96.96 µrad | ± 96.96 µrad | typ. | ||||||
Straightness (Linear crosstalk in X with motion in Y) | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | typ. | ||||||
Straightness (Linear crosstalk in Y with motion in X) | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | typ. | ||||||
Flatness (Linear crosstalk in Z with motion in X) | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | typ. | ||||||
Flatness (Linear crosstalk in Z with motion in Y) | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | typ. | ||||||
Pitch (Rotational crosstalk in θX with motion in Y) | ± 40 µrad | ± 40 µrad | ± 40 µrad | ± 40 µrad | ± 40 µrad | ± 40 µrad | typ. | ||||||
Pitch (Rotational crosstalk in θY with motion in X) | ± 40 µrad | ± 40 µrad | ± 40 µrad | ± 40 µrad | ± 40 µrad | ± 40 µrad | typ. | ||||||
Yaw (Rotational crosstalk in θZ with motion in X) | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | typ. | ||||||
Yaw (Rotational crosstalk in θZ with motion in Y) | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | typ. | ||||||
Positioning | L-738.051100 | L-738.051111 | L-738.051112 | L-738.053111 | L-738.053112 | L-738.053132 | Tolerance | ||||||
Minimum incremental motion in X | 0.2 µm | 0.05 µm | 0.05 µm | 0.1 µm | 0.1 µm | 0.4 µm | typ. | ||||||
Minimum incremental motion in Y | 0.2 µm | 0.05 µm | 0.05 µm | 0.1 µm | 0.1 µm | 0.4 µm | typ. | ||||||
Unidirectional repeatability in X | ± 0.1 µm | ± 0.025 µm | ± 0.025 µm | ± 0.05 µm | ± 0.05 µm | ± 0.2 µm | typ. | ||||||
Unidirectional repeatability in Y | ± 0.1 µm | ± 0.025 µm | ± 0.025 µm | ± 0.05 µm | ± 0.05 µm | ± 0.2 µm | typ. | ||||||
Bidirectional repeatability in X | 4 µm | 1 µm | 1 µm | 1 µm | 1 µm | 4 µm | typ. | ||||||
Bidirectional repeatability in Y | 4 µm | 1 µm | 1 µm | 1 µm | 1 µm | 4 µm | typ. | ||||||
Reference switch | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | |||||||
Reference switch repeatability | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | |||||||
Limit switches | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | |||||||
Integrated sensor | — | Incremental linear encoder | Incremental linear encoder | Incremental linear encoder | Incremental linear encoder | — | |||||||
Sensor signal | — | Sin/cos, 1 V peak-peak | A/B quadrature, RS-422 | Sin/cos, 1 V peak-peak | A/B quadrature, RS-422 | — | |||||||
Sensor signal period | — | 20 µm | — | 20 µm | — | — | |||||||
Sensor resolution | — | 1 nm | 10 nm | 1 nm | 10 nm | — | |||||||
Motor encoder | — | — | — | — | — | Incremental rotary encoder | |||||||
Motor encoder: Sensor signal | — | — | — | — | — | A/B quadrature, RS-422 | |||||||
Resolution, motor encoder | — | — | — | — | — | 20000 Cts./rev. | |||||||
Drive Properties | L-738.051100 | L-738.051111 | L-738.051112 | L-738.053111 | L-738.053112 | L-738.053132 | Tolerance | ||||||
Drive type | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | DC motor | DC motor | DC motor | |||||||
Nominal voltage | 4 V | 4 V | 4 V | — | — | — | |||||||
Nominal current, RMS | 1.2 A | 1.2 A | 1.2 A | 3.9 A | 3.9 A | 3.9 A | typ. | ||||||
Motor resolution | 200 Full steps/rev. | 200 Full steps/rev. | 200 Full steps/rev. | — | — | — | |||||||
Drive force in X | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | typ. | ||||||
Antriebskraft in X | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | typ. | ||||||
Resistance phase-phase | 3.3 Ω | 3.3 Ω | 3.3 Ω | 0.62 Ω | 0.62 Ω | 0.62 Ω | typ. | ||||||
Inductance phase-phase | 2.8 mH | 2.8 mH | 2.8 mH | 0.13 mH | 0.13 mH | 0.13 mH | |||||||
Operating voltage | — | — | — | 24 V | 24 V | 24 V | |||||||
Torque constant | — | — | — | 0.333 N·m/A | 0.333 N·m/A | 0.333 N·m/A | typ. | ||||||
Back EMF, phase-phase, rotational | — | — | — | 3.5 V/kRPM | 3.5 V/kRPM | 3.5 V/kRPM | max. | ||||||
Number of pole pairs | — | — | — | 1 | 1 | 1 | |||||||
Mechanical Properties | L-738.051100 | L-738.051111 | L-738.051112 | L-738.053111 | L-738.053112 | L-738.053132 | Tolerance | ||||||
Permissible push force in Z | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | max. | ||||||
Permissible torque in θX | 130 N·m | 130 N·m | 130 N·m | 130 N·m | 130 N·m | 130 N·m | max. | ||||||
Permissible torque in θY | 130 N·m | 130 N·m | 130 N·m | 130 N·m | 130 N·m | 130 N·m | max. | ||||||
Permissible torque in θZ | 90 N·m | 90 N·m | 90 N·m | 90 N·m | 90 N·m | 90 N·m | max. | ||||||
Holding force in X, passive | 60 N | 60 N | 60 N | 20 N | 20 N | 20 N | |||||||
Holding force in Y, passive | 60 N | 60 N | 60 N | 20 N | 20 N | 20 N | |||||||
Moved mass in X, unloaded | 13.8 g | 13.8 g | 13.8 g | 14.6 g | 14.6 g | 14.6 g | |||||||
Moved mass in Y, unloaded | 5.8 g | 5.8 g | 5.8 g | 5.8 g | 5.8 g | 5.8 g | |||||||
Drive screw type | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | |||||||
Drive screw pitch | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | 2 mm | |||||||
Guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | |||||||
Overall mass | 22000 g | 22000 g | 22000 g | 24000 g | 24000 g | 24000 g | |||||||
Material | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | |||||||
Miscellaneous | L-738.051100 | L-738.051111 | L-738.051112 | L-738.053111 | L-738.053112 | L-738.053132 | Tolerance | ||||||
Operating temperature range | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | |||||||
Connector | 2 × HD D-sub 26 (m) | 2 × HD D-sub 26 (m) | 2 × HD D-sub 26 (m) | 2 × HD D-sub 26 (m) | 2 × HD D-sub 26 (m) | 2 × HD D-sub 26 (m) | |||||||
Recommended controllers / drivers | G-901.R319 C-663.12, C-885 with C-663.12C885 ACS modular controller | G-901.R319 ACS modular controller | G-901.R319 C-663.12, C-885 with C-663.12C885 ACS modular controller | G-901.R319 C-891.130300, C-885 with C-891.11C885 ACS modular controller | G-901.R319 C-863, C-885 with C-863.20C885 C-884 ACS modular controller | G-901.R319 C-863, C-885 with C-863.20C885 C-884 ACS modular controller | |||||||
Sensor connector | — | 2 × D-sub 15 (f) | — | 2 × D-sub 15 (f) | — | — |
Note on nominal current, RMS: value per motor phase
Downloads
Datasheet
Datasheet L-738
Documentation
Short Instructions MP146EK
Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx
User Manual MP183
L-738 / V-738 Precision XY Stage
3D Models
3-D model L-738
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Precision XY stage; 2-phase stepper motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 35 mm/s × 35 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
Precision XY stage; 2-phase stepper motor; 102 mm x 102 mm travel range (X × Y); 200 N load capacity; 35 mm/s × 35 mm/s maximum velocity; ball screw; incremental linear encoder, 10 nm sensor resolution, A/B quadrature, RS-422
Precision XY stage; DC motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 50 mm/s × 50 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
Precision XY stage; DC motor; 102 mm x 102 mm travel range (X × Y); 200 N load capacity; 50 mm/s × 50 mm/s maximum velocity; ball screw; incremental linear encoder, 10 nm sensor resolution, A/B quadrature, RS-422
Precision XY stage; DC motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 90 mm/s × 90 mm/s maximum velocity; ball screw; incremental rotary encoder, 20000 counts/rev resolution, A/B quadrature, RS-422