PICMA® Chip Multilayer Actuators

Miniature Multilayer Piezo Actuators

Superior lifetime
Ultracompact: from 2 mm × 2 mm × 2 mm
Ideal for dynamic operation
Microsecond response time
Subnanometer resolution
UHV-compatible to 10^-9 hPa

PL0xx: Dimensions

On request, PICMA® Chip piezo actuators can be manufactured with an all-ceramic-insulated inner hole (left) or with precision-ground ceramic end plates (right).

Piezo linear actuator with PICMA

Operating voltage -20 to 100 V. Ceramic insulation, polymer-free. Insensitive to humidity. UHV-compatible to 10^-9 hPa, no outgassing, high bakeout temperature. Flexible thanks to numerous designs. Versions with square, round, or annular cross section.

Possible modifications

PTFE-insulated connecting wires. Various geometric shapes, inner hole. Precision-ground ceramic end plates.

Application fields

Industry and research. For laser tuning, microdispensing, life sciences.

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Datasheet

Version / Date

2026-03-10

pdf - 2 MB

Version / Date

2026-03-10

pdf - 2 MB

Télécharger

	PL022.3x	PL033.3x	PL055.3x	PL088.3x	Unit	Tolerance
Side length (A)	2 ±0.10	3 ±0.10	5 ±0.15	10 ±0.20	mm
Side length (B)	2 ±0.10	3 ±0.10	5 ±0.15	10 ±0.20	mm
Height (TH)	2 ±0.10	2 ±0.10	2 ±0.10	2 ±0.10	mm
Travel range*	2.2	2.2	2.2	2.2	µm	±20 %
Blocking force**	>120	>300	>500	>2000	N
Electrical capacitance***	25	75	250	1100	nF	±20 %
Axial resonant frequency****	>600	>600	>600	>600	kHz
Piezoceramics	PIC252	PIC252	PIC252	PIC252
Operating voltage range	-20 to 100	-20 to 100	-20 to 100	-20 to 100	V
Operating temperature range	-40 to 150	-40 to 150	-40 to 150	-40 to 150	°C
Recommended preload for dynamic operation	15	15	15	15	MPa
Maximum preload for constant force	30	30	30	30	MPa
Recommended electronics	E-610, E-617, E-831	E-610, E-617, E-831	E-610, E-617, E-831	E-610, E-617, E-831

Standard connections: PL0xx.31: PTFE-insulated connecting wires, UHV-compatible, 100 mm, AWG 32, Ø 0.49 mm; PL0xx.30: solderable contacts

* At 0 to 100 V. The values refer to the unattached component and may be lower when glued on.

** At 0 to 100 V

*** Measured at 1 V, 1 kHz, RT

**** Measured at 1 V, unloaded, unclamped. The value is halved for unilateral clamping. Depending on the installation situation, the lateral resonant frequencies can be lower than the axial resonant frequencies.

Custom versions are available on request.

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Datasheet

Version / Date

2026-03-10

pdf - 2 MB

Version / Date

2026-03-10

pdf - 2 MB

Télécharger

Datasheet

Version / Date

2025-08

pdf - 662 KB

Version / Date

2025-08

pdf - 586 KB

Télécharger

Documentation

PL022 / PL033 / PL055 / PL088 PICMA® Chip miniature multilayer piezo actuators; PD161 Round PICMA® Chip miniature multilayer piezo actuators; PD050 / PD080 / PD120 / PD150 / PD160 Round PICMA® Chip miniature multilayer piezo actuators with inner hole

Version / Date

1.1.0 2021-09-27

pdf - 2 MB

Version / Date

1.1.0 2021-09-27

pdf - 2 MB