Rotary Stage | Air Bearings | Low Profile | Motorized | PI

Friction-free, Motorized

150 mm, 200 mm or 350 mm
motion platform diameter
Low profile
Eccentricity and flatness < 100 nm
Option for self-locking at rest by magnetic preload

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A-634, dimensions in mm

A-635, dimensions in mm

A-638, dimensions in mm

Product overview

The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance.

3-Phase torque motor

Brushless
Slotless
Low cogging torque

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Accessories and options

Incremental or absolute encoder
Vacuum feedthrough
Self-locking at rest by magnetic preload
Clear aperture on request
PIglide filter and air preparation kit
Single or multi-axis motion controllers and servo drives
Multi-axis/customized setups
Base plates made of granite and systems for reducing vibration

Application fields

Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

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Datasheet

Version / Date

2024-09-24

pdf - 2 MB

Version / Date

2024-09-24

pdf - 2 MB

Version / Date

2020-01-14

pdf - 702 KB

Télécharger

Motion	A-634.A100	A-634.B100	A-635.A100	A-635.B100	A-638.A100	A-638.B100	Tolerance
Active axes	θZ	θZ	θZ	θZ	θZ	θZ
Rotation range in θZ	360 °	360 °	360 °	360 °	360 °	360 °
Maximum angular velocity in θZ, unloaded	500 rpm	500 rpm	500 rpm	500 rpm	500 rpm	500 rpm
Radial error in X	± 0.1 µm	± 0.1 µm	± 0.075 µm	± 0.075 µm	± 0.005 µm	± 0.005 µm	max.
Axial error	± 0.038 µm	± 0.038 µm	± 0.038 µm	± 0.038 µm	± 0.025 µm	± 0.025 µm	max.
Tilt error around X (wobble)	± 1 µrad	± 1 µrad	± 1 µrad	± 1 µrad	± 0.5 µrad	± 0.5 µrad	max.
Positioning	A-634.A100	A-634.B100	A-635.A100	A-635.B100	A-638.A100	A-638.B100	Tolerance
Positioning accuracy in θZ, calibrated	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	typ.
Bidirectional repeatability in θZ	4 µrad	4 µrad	4 µrad	4 µrad	4 µrad	4 µrad	typ.
Reference switch	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak	—	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak	—	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak	—
Integrated sensor	Incremental angle-measuring system	Absolute angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system
Sensor signal	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C
Sensor signal periods / U	23600	—	31488	—	31488	—
Sensor resolution, rotational	0.06 µrad	0.0015 µrad	0.05 µrad	0.0015 µrad	0.05 µrad	0.0015 µrad
Drive Properties	A-634.A100	A-634.B100	A-635.A100	A-635.B100	A-638.A100	A-638.B100	Tolerance
Drive type	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor
Nominal voltage	48 V	48 V	48 V	48 V	48 V	48 V
Peak voltage	80 V	80 V	80 V	80 V	80 V	80 V
Nominal current, RMS	2.3 A	2.3 A	4.5 A	4.5 A	4.5 A	4.5 A	typ.
Peak current, RMS	6.9 A	6.9 A	13.9 A	13.9 A	13.9 A	13.9 A	typ.
Drive torque clockwise in θZ	1.6 N·m	1.6 N·m	2.8 N·m	2.8 N·m	2.8 N·m	2.8 N·m	max.
Drive torque counterclockwise in θZ	1.6 N·m	1.6 N·m	2.8 N·m	2.8 N·m	2.8 N·m	2.8 N·m	max.
Peak torque clockwise in θZ	4.7 N·m	4.7 N·m	8.5 N·m	8.5 N·m	8.5 N·m	8.5 N·m	max.
Peak torque counterclockwise in θZ	4.7 N·m	4.7 N·m	8.5 N·m	8.5 N·m	8.5 N·m	8.5 N·m	max.
Torque constant	0.59 N·m/A	0.59 N·m/A	0.66 N·m/A	0.66 N·m/A	0.66 N·m/A	0.66 N·m/A	typ.
Resistance phase-phase	6.7 Ω	6.7 Ω	4.5 Ω	4.5 Ω	4.5 Ω	4.5 Ω	typ.
Inductance phase-phase	0.9 mH	0.9 mH	0.6 mH	0.6 mH	0.6 mH	0.6 mH
Back EMF, phase-phase, rotational	71 V/kRPM	71 V/kRPM	80 V/kRPM	80 V/kRPM	80 V/kRPM	80 V/kRPM	max.
Mechanical Properties	A-634.A100	A-634.B100	A-635.A100	A-635.B100	A-638.A100	A-638.B100	Tolerance
Permissible push force in X	40 N	40 N	80 N	80 N	200 N	200 N	max.
Permissible push force in Y	40 N	40 N	80 N	80 N	200 N	200 N	max.
Permissible push force in Z	190 N	190 N	320 N	320 N	1200 N	1200 N	max.
Permissible torque in θX	4.5 N·m	4.5 N·m	12 N·m	12 N·m	130 N·m	130 N·m	max.
Permissible torque in θY	4.5 N·m	4.5 N·m	12 N·m	12 N·m	130 N·m	130 N·m	max.
Moment of inertia in θZ, unloaded	6710 kg·mm²	6710 kg·mm²	21580 kg·mm²	21580 kg·mm²	147090 kg·mm²	147090 kg·mm²	±20 %
Moved mass in θZ, unloaded	1900 g	1900 g	3600 g	3600 g	11000 g	11000 g	±5 %
Bearing type	Air bearings with magnetic preload	Air bearings with magnetic preload	Air bearings with magnetic preload	Air bearings with magnetic preload	Air bearings with magnetic preload	Air bearings with magnetic preload
Overall mass	4600 g	4600 g	7500 g	7500 g	24000 g	24000 g	±5 %
Material	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware
Miscellaneous	A-634.A100	A-634.B100	A-635.A100	A-635.B100	A-638.A100	A-638.B100	Tolerance
Operating temperature range	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C
Connector	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)
Sensor connector	D-sub 15 (m)	D-sub 15 (m)	D-sub 15 (m)	D-sub 15 (m)	D-sub 15 (m)	D-sub 15 (m)
Operating pressure	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa
Air consumption	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	max.
Air quality	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3
Recommended controllers / drivers	A-81x (1, 2, or 4 axes) A-82x (4, 6, or 8 axes)	A-81x (1, 2, or 4 axes) A-82x (4, 6, or 8 axes)	A-81x (1, 2, or 4 axes) A-82x (4, 6, or 8 axes)	A-81x (1, 2, or 4 axes) A-82x (4, 6, or 8 axes)	A-81x (1, 2, or 4 axes) A-82x (4, 6, or 8 axes)	A-81x (1, 2, or 4 axes) A-82x (4, 6, or 8 axes)

Note on linear and rotational crosstalk: Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please contact PI for

application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.

Note on permissible push force and permissible torque: The values listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required.

Note on angular velocity: May be limited by the payload, payload imbalance, controller or drive.

Note on sensor resolution for A-63x.A100: Assumes 4096x interpolation. Contact PI for the use of other factors.

Note on positioning accuracy: The specified values are based on error compensation controlled by the controller. The stage must be ordered with an A-8xx series controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.

Note on operating pressure: To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

Ask about customized versions.

At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.

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Datasheet

Version / Date

2024-09-24

pdf - 2 MB

Version / Date

2024-09-24

pdf - 2 MB

Version / Date

2020-01-14

pdf - 702 KB

Télécharger

Documentation

A-63x Series Low Profile Rotary Air Bearing Stage PIglide RL, Direct-drive Torque Motor Driven with Encoder Feedback

Version / Date

3.0 2021-11-29

pdf - 1 MB

Anglais

3D Models

Version / Date

2021-12-09

zip - 3 MB

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Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

A-634.A100

PIglide RL rotation stage, air bearing, 150 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, slotless, brushless 3-phase torque motor

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A-634.B100

PIglide RL rotation stage, air bearing, 150 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, slotless, brushless 3-phase torque motor

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A-635.A100

PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, slotless, brushless 3-phase torque motor

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A-635.B100

PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, slotless, brushless 3-phase torque motor

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A-638.A100

PIglide RL rotation stage, air bearing, 350 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, slotless, brushless 3-phase torque motor

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A-638.B100

PIglide RL rotation stage, air bearing, 350 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, slotless, brushless 3-phase torque motor

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