N-111 NEXLINE® OEM Linear Actuator

Nanopositioning Over Long Travel Ranges, PiezoWalk® Principle

Travel range 10 mm
Integrated direct-measuring linear encoder with resolution 5 nm
Force generation to 50 N
Holding force to 70 N

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N-111.2A1, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

N-111.201, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Industrial precision positioning
Semiconductor technology
Semiconductor tests
Wafer inspection
Lithography
Nanoimprinting
Nanometrology
Motion in strong magnetic fields and in a vacuum

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

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Datasheet

Version / Date

2023-01-23

pdf - 697 KB

Version / Date

2023-01-23

pdf - 696 KB

Version / Date

2019-01-22

pdf - 670 KB

Télécharger

Select a travel range:

Motion	N-111.201	N-111.2A1	Tolerance
Active axes	X	X
Travel range in X	10 mm	10 mm
Travel range in X (analog mode)	± 2 µm	± 2 µm
Velocity (10% duty cycle, full-step mode)	1 mm/s	1 mm/s	max.
Velocity (100% duty cycle, full-step mode)	0.6 mm/s	0.6 mm/s	max.
Velocity (100% duty cycle, nanostepping mode)	0.4 mm/s	0.4 mm/s	max.
Positioning	N-111.201	N-111.2A1	Tolerance
Resolution in X, open loop	0.025 nm	0.025 nm	typ.
Integrated sensor		Incremental linear encoder
System resolution in X		5 nm
Reference switch		Optical, direction sensing (reference edge track), 5 V, TTL
Drive Properties	N-111.201	N-111.2A1	Tolerance
Operating voltage	-250 to +250	-250 to +250
Drive type	NEXLINE® piezo walking drive	NEXLINE® piezo walking drive
Drive force in X	50 N	50 N	max.
Mechanical Properties	N-111.201	N-111.2A1	Tolerance
Holding force in X, passive	70 N	70 N	min.
Overall mass	245 g	325 g
Material	Aluminum, stainless steel, titanium	Aluminum, stainless steel, titanium
Miscellaneous	N-111.201	N-111.2A1	Tolerance
Operating temperature range	0 to 55 °C	0 to 55 °C
Connector	D-sub 25-pin (m)	D-sub 25-pin (m)
Cable length	1.5 m	1.5 m	+50 / -0 mm
Recommended controllers / drivers	E-712.1AM	E-712.1AM

Velocity in full-step mode Depending on drive electronics.

Velocity in nanostepping mode: Depending on drive electronics. The maximum velocity in nanostepping mode is designed for the best possible constancy so that no velocity variations occur when executing the steps.

Drive force: Data refer to operation in full step mode.

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Datasheet

Version / Date

2023-01-23

pdf - 697 KB

Version / Date

2023-01-23

pdf - 696 KB

Version / Date

2019-01-22

pdf - 670 KB