N-216 NEXLINE® Linear Actuator

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

Force generation to 600 N
Holding force to 800 N
Travel range 20 mm
Integrated direct-measuring linear encoder with resolution 5 nm

Comparison of the motion type of a NEXLINE® actuator: The nanostepping mode provides very smooth motion. Full step mode allows higher speed.

N-216, dimensions in mm

Application fields

Industrial precision positioning
Semiconductor technology
Semiconductor tests
Wafer inspection
Lithography
Nanoimprinting
Nanometrology
Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk^® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk^® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

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Datasheet

Version / Date

2024-01-09

pdf - 786 KB

Version / Date

2024-01-09

pdf - 808 KB

Version / Date

2019-01-22

pdf - 788 KB

Télécharger

Motion	N-216.1A1	N-216.2A1	Tolerance
Active axes	X	X
Travel range in X	20 mm	20 mm
Travel range in X (analog mode)	± 3 µm	± 3 µm
Velocity (10% duty cycle, full-step mode)	1 mm/s	1 mm/s	max.
Velocity (100% duty cycle, full-step mode)	0.6 mm/s	0.6 mm/s	max.
Velocity (100% duty cycle, nanostepping mode)	0.4 mm/s	0.4 mm/s	max.
Positioning	N-216.1A1	N-216.2A1	Tolerance
Reference switch	Optical, direction sensing (reference edge track), 5 V, TTL	Optical, direction sensing (reference edge track), 5 V, TTL
Resolution in X, open loop	0.03 nm	0.03 nm	typ.
Integrated sensor	Incremental linear encoder	Incremental linear encoder
System resolution in X	5 nm	5 nm
Drive Properties	N-216.1A1	N-216.2A1	Tolerance
Drive type	NEXLINE® piezo walking drive	NEXLINE® piezo walking drive
Operating voltage	-250 to +250 V	-250 to +250 V
Drive force in X	300 N	600 N	max.
Mechanical Properties	N-216.1A1	N-216.2A1	Tolerance
Holding force in X, passive	400 N	800 N	min.
Overall mass	1150 g	1250 g
Material	Aluminum, stainless steel	Aluminum, stainless steel
Miscellaneous	N-216.1A1	N-216.2A1	Tolerance
Operating temperature range	0 to 55 °C	0 to 55 °C
Connector	D-sub 25-pin (m)	D-sub 25-pin (m)
Cable length	2 m	2 m	+50 / -0 mm
Recommended controllers / drivers	E-712.1AM	E-712.1AM

Velocity in full-step mode: Depending on drive electronics.

Velocity in nanostepping mode: Depending on drive electronics. The maximum velocity in nanostepping mode is designed for the best possible constancy so that no velocity variations occur when performing the steps.

Drive force: Data refer to full step mode operation.

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Datasheet

Version / Date

2024-01-09

pdf - 786 KB

Version / Date

2024-01-09

pdf - 808 KB

Version / Date

2019-01-22

pdf - 788 KB