D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

For applications with the highest precision requirements
Measuring range to 300 µm
Resolution to 0.01 nm
Linearity error to 0.01% with digital controller
E-509.CxA control electronics, compatible with E-500 piezo controller system

Motion of a piezo nanopositioning system with 0.3 nm steps, measured with a capacitive sensor from PI (lower curve) and with a highly accurate laser interferometer (model Zygo ZMI 2000, upper curve). The capacitive sensor shows a significantly higher resolution than the interferometer.

D-050.00, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

D-100.00, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Resolution

Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/√Hz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.

In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.

Application fields

High-precision positioning.

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Datasheet

Version / Date

2022-08-31

pdf - 517 KB

Version / Date

2022-08-31

pdf - 519 KB

Version / Date

2018-06-18

pdf - 860 KB

Télécharger

	D-050.00	D-100.00
Sensor type	Capacitive	Capacitive
Nominal measuring range	50 µm	100 µm
Extended measuring range	150 µm	300 µm
Resolution	0.001% of the measuring range	0.001% of the measuring range
Linearity error	0.01 %	0.01 %
Sensor active area	56.5 mm²	113.1 mm²
Thermal drift	50 ppm/K	50 ppm/K
Material	Aluminum	Aluminum
Cable length	1 m	1 m
Operating temperature range	-20 to 80 °C	-20 to 80 °C
Recommended evaluation electronics	E-509.CxA	E-509.CxA
Connector	LEMO FFA.00.250.CTLC31	LEMO FFA.00.250.CTLC31

Resolution: At 3 kHz, with E-509.C3A.

Linearity error: With digital controller; to 0.05 % with E-509 analog controller.

Thermal drift: Change of active surface size in ppm (parts per million), refers to measuring range.

Ask for custom materials.

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Product Note

Version / Date

2021-12-20

pdf - 111 KB

Anglais

Télécharger

Datasheet

Version / Date

2022-08-31

pdf - 517 KB

Version / Date

2022-08-31

pdf - 519 KB

Version / Date

2018-06-18

pdf - 860 KB

Télécharger

Documentation

D-015, D-050, D-100 Capacitive Sensors

Version / Date

2003-11-05

pdf - 228 KB

Anglais

Aller au devis / à la commande

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

D-050.00

Capacitive two-plate position sensor, 50 µm nominal measuring range, aluminum

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D-100.00

Capacitive two-plate position sensor, 100 µm nominal measuring range, aluminum

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Compatible Electronics Related Products

D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

Specifications

Datasheet D-050 • D-100

Specifications

Downloads

Product Note

Product Change Notification D-015

Datasheet

Datasheet D-050 • D-100

Documentation

User Manual PZ106

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Technologie

Capteurs capacitifs

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