A-361 PIglide Air-Bearing XY Rotation Stage

High Performance • Cleanroom-Compatible • Low Profile

Travel range in X and Y directions ±2.5 mm
Rotation range ±1°
Load capacity to 3 kg
Motion platform diameter 200 mm
Overall height 40 mm
Integrated vacuum chuck
Friction-free operation, air bearings lockable

A-361, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

6-axis combination of A-361 (top) and A-523 (bottom): design for fiber positioning. (The coffee cup serves for size comparison.)

A-361 is an air-bearing XY-ThetaZ stage with direct drives. Designed as a parallel-kinematic multi-axis system, the platform moves in the X and Y directions as well as rotational in the Z axis. This stage offers ultra-high precision with a very low profile. The combination of the noncontact components results in frictionless movements. Thereby the A-361 offers not only ultra-high precision, but very high performance, and long service life. As the A-361 can be locked as needed, it offers excellent positional stability.

The A-361 can be mounted on a A-523 Z tip/tilt stage. This results in a compact 6 degrees of freedom motion system.

Air filter preparation kits
Compatible A-8xx cables
Multi-axis A-8xx controller
Integrated vacuum chuck

The stage is ideally suited for many high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.

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Datasheet

Version / Date

2024-02-21

pdf - 622 KB

Version / Date

2024-02-21

pdf - 631 KB

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Motion	A-361.AA100	Tolerance
Active axes	X, Y, θZ
Travel range in X, Y ⁽¹⁾	± 2.5 mm	max.
Rotation range in θZ ⁽¹⁾	± 1°	max.
Pitch (X, Y)	25 µrad	max.
Yaw (X, Y)	2 µrad	max.

Positioning	A-361.AA100	Tolerance
Minimum incremental motion in X, Y ⁽²⁾	< 30 nm	typ.
Minimum incremental motion in θZ ⁽²⁾	< 0.5 µrad	typ.
Positioning accuracy in X, Y, calibrated ⁽³⁾	± 0.2 µm	max.
Positioning accuracy in θZ, calibrated ⁽³⁾	± 5 µrad	max.
Bidirectional repeatability in X, Y	0.2 µm	max.
Bidirectional repeatability in θZ	4 µrad	max.
Integrated sensor	3 × incremental, optical
Sensor signal	Sin/cos, 1 V peak-peak
Sensor signal period	80 µm, 20 nm with 4096x interpolation

Drive properties	A-361.AA100	Tolerance
Drive type	Voice coil (X axis: 1 ×,Y axis: 2 ×)
Bus voltage	48 V DC nom., 48 V DC max.
Continuous current	0.5 A	max.
Peak current	1.5 A	max.
Continuous force	6 N	max.
Peak force	19.2 N	max.
Force constant	11.7 N/A	typ.
Resistance phase-phase	25 Ω	typ.
Inductance phase-phase	8.8 mH	typ.
Back EMF phase-phase	12 V·s/m	typ.
Pole pitch N-N	N/A

Mechanical properties	A-361.AA100	Tolerance
Permissible push force in Z ⁽⁴⁾	30 N	max.
Moved mass, unloaded	1400 g	typ.
Guide	Air bearing guide with air preload, lockable
Overall mass	3.4 kg	typ.
Material	Hardcoat aluminum, stainless steel mounting hardware

Miscellaneous	A-361.AA100	Tolerance
Connector	HD D-sub 44 (m)
Air connector	One-touch fitting for tubing with 4 mm outer diameter
Vacuum connector	One-touch fitting for tubing with 6 mm outer diameter
Operating pressure ⁽⁵⁾	447 bis 517 kPa
Air consumption	28 L/min	max.
Air quality	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1, Oil free - ISO 8573–1 class 1, Dry (-15 °C dew point) - ISO 8573–1 class 3

⁽¹⁾ The X and Y travel ranges and the rotation range in θZ are related. The values in the table show the maximum travel range for each axis, when all other axes are at the reference position.

⁽²⁾ Is directly related to the system stability (servo jitter); this depends on the servo drive used. The position stability can be improved by using ServoBoost^TM PLUS on an ACS SPiiPlus controller.

⁽³⁾ The calibrated accuracy can only be achieved with a controller-driven error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.

⁽⁴⁾ Assumes an air bearing operating pressure of 480 kPA (70 psi). The stage is designed for horizontal operation only.

⁽⁵⁾ To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller.

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Datasheet

Version / Date

2024-02-21

pdf - 622 KB

Version / Date

2024-02-21

pdf - 631 KB

Télécharger

3D Models

zip - 1 MB

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A-361.AA100

PIglide air-bearing XY rotation stage; voice coil drive; ±2.5 mm × ±2.5 mm travel range (X × Y), ±1° rotation range (θZ); 30 N load capacity; 3 incremental encoders with sin/cos signal transmission, 80 µm signal period

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