A-361 PIglide Air-Bearing XY Rotation Stage
High Performance • Cleanroom-Compatible • Low Profile
- Travel range in X and Y directions ±2.5 mm
- Rotation range ±1°
- Load capacity to 3 kg
- Motion platform diameter 200 mm
- Overall height 40 mm
- Integrated vacuum chuck
- Friction-free operation, air bearings lockable
Product overview
A-361 is an air-bearing XY-ThetaZ stage with direct drives. Designed as a parallel-kinematic multi-axis system, the platform moves in the X and Y directions as well as rotational in the Z axis. This stage offers ultra-high precision with a very low profile. The combination of the noncontact components results in frictionless movements. Thereby the A-361 offers not only ultra-high precision, but very high performance, and long service life. As the A-361 can be locked as needed, it offers excellent positional stability.
The A-361 can be mounted on a A-523 Z tip/tilt stage. This results in a compact 6 degrees of freedom motion system.
Accessories and options
- Air filter preparation kits
- Compatible A-8xx cables
- Multi-axis A-8xx controller
- Integrated vacuum chuck
Application Fields
The stage is ideally suited for many high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.
Specifications
Datasheet A-361
Specifications
Positioning | A-361.AA100 | Tolerance |
---|---|---|
Minimum incremental motion in X, Y (2) | < 30 nm | typ. |
Minimum incremental motion in θZ (2) | < 0.5 µrad | typ. |
Positioning accuracy in X, Y, calibrated (3) | ± 0.2 µm | max. |
Positioning accuracy in θZ, calibrated (3) | ± 5 µrad | max. |
Bidirectional repeatability in X, Y | 0.2 µm | max. |
Bidirectional repeatability in θZ | 4 µrad | max. |
Integrated sensor | 3 × incremental, optical | |
Sensor signal | Sin/cos, 1 V peak-peak | |
Sensor signal period | 80 µm, 20 nm with 4096x interpolation |
Drive properties | A-361.AA100 | Tolerance |
---|---|---|
Drive type | Voice coil (X axis: 1 ×,Y axis: 2 ×) | |
Bus voltage | 48 V DC nom., 48 V DC max. | |
Continuous current | 0.5 A | max. |
Peak current | 1.5 A | max. |
Continuous force | 6 N | max. |
Peak force | 19.2 N | max. |
Force constant | 11.7 N/A | typ. |
Resistance phase-phase | 25 Ω | typ. |
Inductance phase-phase | 8.8 mH | typ. |
Back EMF phase-phase | 12 V·s/m | typ. |
Pole pitch N-N | N/A |
Miscellaneous | A-361.AA100 | Tolerance |
---|---|---|
Connector | HD D-sub 44 (m) | |
Air connector | One-touch fitting for tubing with 4 mm outer diameter | |
Vacuum connector | One-touch fitting for tubing with 6 mm outer diameter | |
Operating pressure (5) | 447 bis 517 kPa | |
Air consumption | 28 L/min | max. |
Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1, Oil free - ISO 8573–1 class 1, Dry (-15 °C dew point) - ISO 8573–1 class 3 |
Downloads
Datasheet
Datasheet A-361
3D Models
A-361 3D Model
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